Thiết bị đo và điều khiển lưu lượng khí ga - GF40 Brooks Vietnam

• Programmable multi-gas/multi-range capabilities
• Brooks® MultiFlo™ gas database contains thousands of native gas runs to establish correction functions
• Sub-1 second flow response time and accuracy of 1% set point for demanding applications
• Well suited for a variety of gases
• Fast response, Hastelloy sensor
• Easily accessible diagnostic service port is independent of tool communication
• Multi-protocol communication options include DeviceNet™, EtherCAT®, Profibus® and RS-485 analog interface

• MultiFlo™ technology enables new gas calibrations and full-scale ranges without removing the MFC from the gas line, maximizing process uptime
• MultiFlo™ programming is simple and user-friendly; new gas can be selected in under 60 seconds
• OEMs and large end users can greatly reduce the number of gas and range-specific controllers they inventory
• Excellent process gas accuracy backed by superior metrology systems and calibration based on global standards
• Corrosion-resistant sensor provides unmatched long-term stability ensuring maximum yield and throughput
• User-accessible service port simplifies troubleshooting and diagnostic tasks
• Variety of elastomer seals provide cost performance flexibility across range of applications
• Multi-protocol communication interface supports integration into existing systems

• Solar cell chemical vapor deposition systems
• Life sciences bioreactors
• Vacuum processes
• Nanotechnology/MEMS fabrication
• Plasma, glass and web coating systems
• Excellent option for manifold/gas delivery systems

Thiết bị đo và điều khiển lưu lượng khí ga - GF40 Brooks Vietnam