GF40 Brooks Instrument, bộ điều khiển lưu lượng

Bộ điều khiển lưu lượng Brooks Instrument Việt Nam

Models GF40

Features

• Programmable multi-gas/multi-range capabilities

• Brooks® MultiFlo™ gas database contains thousands of native gas runs to establish correction functions

• Sub-1 second flow response time and accuracy of 1% set point for demanding applications

• Well suited for a variety of gases

• Fast response, Hastelloy sensor

• Easily accessible diagnostic service port is independent of tool communication

• Multi-protocol communication options include DeviceNet™, EtherCAT®, Profibus® and RS-485 analog interface

Benefits

• MultiFlo™ technology enables new gas calibrations and full-scale ranges without removing the MFC from the gas line, maximizing process uptime

• MultiFlo™ programming is simple and user-friendly; new gas can be selected in under 60 seconds

• OEMs and large end users can greatly reduce the number of gas and range-specific controllers they inventory

• Excellent process gas accuracy backed by superior metrology systems and calibration based on global standards

• Corrosion-resistant sensor provides unmatched long-term stability ensuring maximum yield and throughput

• User-accessible service port simplifies troubleshooting and diagnostic tasks

• Variety of elastomer seals provide cost performance flexibility across range of applications

• Multi-protocol communication interface supports integration into existing systems

Applications

• Solar cell chemical vapor deposition systems

• Life sciences bioreactors

• Vacuum processes

• Nanotechnology/MEMS fabrication

• Plasma, glass and web coating systems

• Excellent option for manifold/gas delivery systems

GF40 Brooks Instrument, bộ điều khiển lưu lượng